Spectroscopic ellipsometry studies on the optical constants of indium tin oxide films deposited under various sputtering conditions

Title
Spectroscopic ellipsometry studies on the optical constants of indium tin oxide films deposited under various sputtering conditions
Authors
정연식
Keywords
Indium Tin Oxide; Ellipsometry; Optical Properties; sputtering
Issue Date
2004-11
Publisher
Thin Solid Films
Citation
VOL 467, NO 1-2, 36-42
URI
http://pubs.kist.re.kr/handle/201004/25687
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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