Influence of dc magnetron sputtering parameters on surface morphology of indium tin oxide thin films

Title
Influence of dc magnetron sputtering parameters on surface morphology of indium tin oxide thin films
Authors
정연식이동욱전덕영
Keywords
Indium Tin Oxide; Sputtering; Atomic force microscopy; Morphology
Issue Date
2004-01
Publisher
Applied Surface Science
Citation
VOL 221, NO 1-4, 136-142
URI
http://pubs.kist.re.kr/handle/201004/25688
ISSN
0169-4332
Appears in Collections:
KIST Publication > Article
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