Defect Density and Atomic Bond Structure of Tetrahedral Amorphous Carbon (ta-C) Films Prepared by Filtered Vacuum Arc Process

Title
Defect Density and Atomic Bond Structure of Tetrahedral Amorphous Carbon (ta-C) Films Prepared by Filtered Vacuum Arc Process
Authors
이철승신진국은광용이광렬윤기현
Keywords
ta-C; defect; NEXAFS; ESR; structure
Issue Date
2004-05
Publisher
Journal of Applied Physics
Citation
VOL 95, NO 9, 4829-4832
URI
http://pubs.kist.re.kr/handle/201004/25782
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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