Structure and Mechanical Properties of Si Incorporated Diamond-like Carbon Films Prepared y PACVD

Title
Structure and Mechanical Properties of Si Incorporated Diamond-like Carbon Films Prepared y PACVD
Authors
김명근최준엽이광렬은광용
Keywords
DLC; Si 함유; Structure; Mechanical Properties; Structural change; Si Incorporation
Issue Date
1997-02
Publisher
J. Kor. Cer. Soc.
Citation
VOL 3, NO 2, 101-104
URI
http://pubs.kist.re.kr/handle/201004/25785
Appears in Collections:
KIST Publication > Article
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