Measurement of Elastic Modulus and Poisson's Ratio of Diamond-like Carbon Films

Title
Measurement of Elastic Modulus and Poisson's Ratio of Diamond-like Carbon Films
Authors
조성진이광렬은광용고대홍
Keywords
DLC; elastic modulus; poisson ratio; mechanical property; residual stress; MEMS
Issue Date
1998-02
Publisher
MRS Symp. Proc.
Citation
VOL 518, 203-208
URI
http://pubs.kist.re.kr/handle/201004/25796
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE