A variation of elastic modulus of very thin diamond-like carbon films with deposition condition

Title
A variation of elastic modulus of very thin diamond-like carbon films with deposition condition
Authors
정진원이광렬은광용고대홍
Keywords
다이아몬드상 카본; 탄성률측정; 기계적 특성; 박막의 구조
Issue Date
2001-08
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 10, NO 4, 387-395
URI
http://pubs.kist.re.kr/handle/201004/25863
ISSN
1225-8822
Appears in Collections:
KIST Publication > Article
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