Deposition of Iridium Oxide Thin Films as Bottom Electrodes of Ferroelectric Capacitors

Title
Deposition of Iridium Oxide Thin Films as Bottom Electrodes of Ferroelectric Capacitors
Authors
허재성최훈상이종한최인훈문성욱신현준
Keywords
ferroelectric; capacitor; Iridium oxide; electrode
Issue Date
2003-11
Publisher
ISAEM 2003 (3rd Inter. Sympo. on Designing, Processing and Properties of Advanced Engineering Materi
Citation
, 243-243
URI
http://pubs.kist.re.kr/handle/201004/26011
Appears in Collections:
KIST Publication > Conference Paper
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