Effect of Pretreatment on the adhesion of copper film on PET substrate prepared by ECR-MOCVD coupled with a periodic DC bias

Title
Effect of Pretreatment on the adhesion of copper film on PET substrate prepared by ECR-MOCVD coupled with a periodic DC bias
Authors
전법주현진변동진이중기
Keywords
Copper film; ECR-MOCVD; PET; Adhesion; DC bias
Issue Date
2004-10
Publisher
10th APPCChE Congress
URI
http://pubs.kist.re.kr/handle/201004/26053
Appears in Collections:
KIST Publication > Conference Paper
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