Enhancement of ferroelectric properties of SrBi2Nb2O9 thin films by oxygen plasma rapid thermal annealing

Title
Enhancement of ferroelectric properties of SrBi2Nb2O9 thin films by oxygen plasma rapid thermal annealing
Authors
김익수김영미김용태김성일최인훈
Issue Date
2004-02
Publisher
The 11th Korean Conference on Semiconductors
Citation
VOL 2, 447-448
URI
http://pubs.kist.re.kr/handle/201004/26254
Appears in Collections:
KIST Publication > Conference Paper
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