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dc.contributor.author권영석-
dc.contributor.author심선일-
dc.contributor.author김익수-
dc.contributor.author김성일-
dc.contributor.author김용태-
dc.contributor.author최인훈-
dc.date.accessioned2015-12-02T08:07:25Z-
dc.date.available2015-12-02T08:07:25Z-
dc.date.issued200403-
dc.identifier.citation, 174-174-
dc.identifier.other19829-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/26263-
dc.publisherThe 12th Seoul International Symposium on the Physics of Semiconductors and Applications-2004-
dc.titleEtch stop Process of SrBi2Ta2O9 thin film using CeO2 buffer layer for self aligned ferroelectric gate structure-
dc.typeConference Paper-
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