A new atomic layer deposition of W_N thin films

Title
A new atomic layer deposition of W_N thin films
Authors
심현상박지호김용태
Issue Date
2004-09
Publisher
Physica Status Solidi (A)
Citation
VOL 201, NO 13, 92-95
URI
http://pubs.kist.re.kr/handle/201004/26359
ISSN
0031-8965
Appears in Collections:
KIST Publication > Article
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