Time-resolved plasma measurement in a high-power pulsed ICP source for large area

Title
Time-resolved plasma measurement in a high-power pulsed ICP source for large area
Authors
김영우정영대한승희이연희김곤호
Keywords
Pulsed plasma; Time-resolved Langmuir probe; LabVIEW
Issue Date
2004-08
Publisher
Surface and Coatings Technology
Citation
VOL 186, NO 1-2, 161-164
URI
http://pubs.kist.re.kr/handle/201004/26422
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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