Nanoparticle pattern deposition from gas phase onto charged flat surface
- Nanoparticle pattern deposition from gas phase onto charged flat surface
- 강문식; 김형철; 한방우; 서정수; 박정한; 최만수
- Nanoparticle; Patterning; Aerosol; DMA; Soft lithography; Nanopatterning; nanostructure; nanofabrication; contact charging; particle deposition
- Issue Date
- Microelectronic Engineering
- VOL 71, NO 2, 229-236
- Appears in Collections:
- KIST Publication > Article
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