Nanoparticle pattern deposition from gas phase onto charged flat surface

Title
Nanoparticle pattern deposition from gas phase onto charged flat surface
Authors
강문식김형철한방우서정수박정한최만수
Keywords
Nanoparticle; Patterning; Aerosol; DMA; Soft lithography; Nanopatterning; nanostructure; nanofabrication; contact charging; particle deposition
Issue Date
2004-02
Publisher
Microelectronic Engineering
Citation
VOL 71, NO 2, 229-236
URI
http://pubs.kist.re.kr/handle/201004/26445
ISSN
0167-9317
Appears in Collections:
KIST Publication > Article
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