Flexible polysilicon sensor array modules using

Title
Flexible polysilicon sensor array modules using
Authors
황은수김용준주병권
Keywords
Flexible; Packaging; Sensor array; Release-etching; Piezporesistivity; Strain gauge
Issue Date
2004-03
Publisher
Sensors and Actuators A: Physical
Citation
VOL 111, 135-141
URI
http://pubs.kist.re.kr/handle/201004/26457
ISSN
0924-4247
Appears in Collections:
KIST Publication > Article
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