Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems

Title
Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems
Authors
강유리김용국김수원주병권
Keywords
FBAR; Flexible microsystems; Thin wafer
Issue Date
2003-12
Publisher
전기전자재료학회논문지
Citation
VOL 16, NO 12S, 1224-1231
URI
http://pubs.kist.re.kr/handle/201004/26464
ISSN
1226-7945
Appears in Collections:
KIST Publication > Article
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