Electrical, optical and structural properties of transparent and conducting ZnO thin films doped with Al and F by rf magnetron sputter

Title
Electrical, optical and structural properties of transparent and conducting ZnO thin films doped with Al and F by rf magnetron sputter
Authors
최병국김인호김동환이경석이택성정병기백영준김원목
Keywords
TCO; ZnO
Issue Date
2004-06
Publisher
J.Eur.Cer.Soc.(Electroceramics 9)
URI
http://pubs.kist.re.kr/handle/201004/26492
Appears in Collections:
KIST Publication > Conference Paper
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