Electrical properties of screen printed PZT thick films treated with photo-sensitive and diol based sols for cantilever based biochip

Title
Electrical properties of screen printed PZT thick films treated with photo-sensitive and diol based sols for cantilever based biochip
Authors
박재홍손진호윤대성김태송박형호김환
Keywords
cantilever; biochip; PZT; thick film; electrical property
Issue Date
2004-04
Publisher
ISIF 2004
URI
http://pubs.kist.re.kr/handle/201004/26537
Appears in Collections:
KIST Publication > Conference Paper
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