Effects of liquid viscosity and density on resonant behavior of nano-mechanical PZT (52/48) thin film cantilever

Title
Effects of liquid viscosity and density on resonant behavior of nano-mechanical PZT (52/48) thin film cantilever
Authors
황교선윤대성윤기현김태송이정훈
Keywords
resonance frequency; PZT; thin film; cantilever; biosensor
Issue Date
2004-04
Publisher
ISIF 2004
URI
http://pubs.kist.re.kr/handle/201004/26538
Appears in Collections:
KIST Publication > Conference Paper
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