Effect of Carbon Black Addition on Reaction-Bonded Silicon Carbide Ceramics

Title
Effect of Carbon Black Addition on Reaction-Bonded Silicon Carbide Ceramics
Authors
김주선전형우송휴섭이종호이해원
Keywords
compression molding; RBSC; reactive infiltration; carbon black; wafer carrier
Issue Date
2005-03
Publisher
Key Engineering Materials
Citation
VOL 287, 189-193
URI
http://pubs.kist.re.kr/handle/201004/26814
ISSN
1013-9826
Appears in Collections:
KIST Publication > Article
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