Uncooled infrared sensor by MEMS technology

Title
Uncooled infrared sensor by MEMS technology
Authors
한용희김근태신현준안미숙김신근문성욱최인훈오명환
Keywords
MEMS; 볼로메타; 적외선 센서
Issue Date
2004-11
Publisher
한국재료학회 추계학술대회
URI
http://pubs.kist.re.kr/handle/201004/26819
Appears in Collections:
KIST Publication > Conference Paper
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