Variable Optical Attenuator Using Parallel Plate Electrostatic Actuator

Title
Variable Optical Attenuator Using Parallel Plate Electrostatic Actuator
Authors
허재성김태엽신현준문성욱최인훈손창식
Keywords
Attenuator; actuator; VOA; Parallel-plate actuator; Micro-shutter
Issue Date
2004-11
Publisher
Journal of the Korean Physical Society
Citation
VOL 45, S933-S935
URI
http://pubs.kist.re.kr/handle/201004/26820
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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