Mechanical Property Optimization of Materials by Nanostructuring : Reduction of Residual Compressive Stress in a ta-C Film

Title
Mechanical Property Optimization of Materials by Nanostructuring : Reduction of Residual Compressive Stress in a ta-C Film
Authors
이철승이광렬서상희
Keywords
ta-C; filtered vacuum arc; multilayer; stress control; tetrahedral amorphous carbon; thin film; nanostructure; mechanical properties
Issue Date
2004-08
Publisher
Materials Science and Technology
Citation
VOL 20, NO 8, 993-995
URI
http://pubs.kist.re.kr/handle/201004/26823
ISSN
0267-0836
Appears in Collections:
KIST Publication > Article
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