Sulfuric acid treatment of sapphire substrates for growth of high-quality epilayers

Title
Sulfuric acid treatment of sapphire substrates for growth of high-quality epilayers
Authors
최지원노영수정연식윤석진김태환최원국
Keywords
surfuric acid; sapphire; surface roughness; pit; etching; chemical etching of sapphire; Pit-free morphology; H2SO4
Issue Date
2004-07
Publisher
Journal of the Korean Ceramic Society
Citation
VOL 41, NO 7, 493-496
URI
http://pubs.kist.re.kr/handle/201004/26863
Appears in Collections:
KIST Publication > Article
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