Study on texture evolution and properties of silver thin films prepared by sputtering deposition

Title
Study on texture evolution and properties of silver thin films prepared by sputtering deposition
Authors
정연식
Keywords
Sputtering; Silver; XRD; Texture; Optical properties; Electrical properties
Issue Date
2004-01
Publisher
Applied Surface Science
Citation
VOL 221, NO 1-4, 281-287
URI
http://pubs.kist.re.kr/handle/201004/26908
ISSN
0169-4332
Appears in Collections:
KIST Publication > Article
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