Growth of heteroepitaxial ZnO thin film and ZnO/(Mg,Zn)O nanomultilayer by off-axis rf magnetron sputtering

Title
Growth of heteroepitaxial ZnO thin film and ZnO/(Mg,Zn)O nanomultilayer by off-axis rf magnetron sputtering
Authors
박재완박유미박종완전민현이전국
Keywords
ZnO; O2 annealing; Heteroepitaxy; Off axis sputtering; Photoluminescence
Issue Date
2005-01
Publisher
Journal of Vacuum Science and Technology, A
Citation
VOL 23, NO 1, 1-4
URI
http://pubs.kist.re.kr/handle/201004/26913
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE