Fabrication of MFISFETs with Pt/SrBi2Ta2O9/Y2O3/Si gate structure by developing an etch-stop process

Title
Fabrication of MFISFETs with Pt/SrBi2Ta2O9/Y2O3/Si gate structure by developing an etch-stop process
Authors
심선일권영석김성일김용태박정호
Issue Date
2004-09
Publisher
Physica Status Solidi A
Citation
VOL 201, NO 10, R65-R68
URI
http://pubs.kist.re.kr/handle/201004/26979
ISSN
0031-8965
Appears in Collections:
KIST Publication > Article
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