Multi-scale simulation of plasma generation and film deposition in a circular type DC magnetron sputtering system

Title
Multi-scale simulation of plasma generation and film deposition in a circular type DC magnetron sputtering system
Authors
권의희최선희박영호이원종
Keywords
Computer simulation; Particle-in-cell; Monte Carlo collision; Plasma processing and deposition; Sputtering
Issue Date
2005-03
Publisher
Thin Solid Films
Citation
VOL 475, NO 1-2, 13-27
URI
http://pubs.kist.re.kr/handle/201004/27242
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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