Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method

Title
Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method
Authors
김상종강종윤최지원김달영성만영김현재윤석진
Keywords
piezoelectric actuator; bulk micromachining; screen printing method
Issue Date
2005-04
Publisher
Materials Chemistry and Physics
Citation
VOL 90, NO 2-3, 401-404
URI
http://pubs.kist.re.kr/handle/201004/27265
ISSN
0254-0584
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE