Investigation of nanoprotrusion induced by isolated impact of Ar cluster ion beam on Si and GaAs crystal

Title
Investigation of nanoprotrusion induced by isolated impact of Ar cluster ion beam on Si and GaAs crystal
Authors
H.S. ParkH.-J. JungK. Jeong최원국
Keywords
cluster; laval nozzle; time-of-flight; nanoprotrusion; crater; surface embossment; surface etching; isolated cluster impact; ion dose; surface sputtering/smoothing
Issue Date
2005-01
Publisher
Thin Solid Films
Citation
VOL 475, 36-40
URI
http://pubs.kist.re.kr/handle/201004/27297
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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