Inductively Coupled Plasma Reactive Ion Etching of ZrO2: H solid electrolyte film in BCl3-based plasmas

Title
Inductively Coupled Plasma Reactive Ion Etching of ZrO2: H solid electrolyte film in BCl3-based plasmas
Authors
김한기Bae J.WAdesida, IKim, T성태연김주선윤영수
Keywords
고체산화물연료전지; 마이크로 연료전지; 지르코니아
Issue Date
2005-05
Publisher
Journal of the Electrochemical Society
Citation
VOL 152, NO 5, A922-A926
URI
http://pubs.kist.re.kr/handle/201004/27301
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE