A Fabrication of IR CO2 Sensor based on the MEMS and Characteristic Evaluation

Title
A Fabrication of IR CO2 Sensor based on the MEMS and Characteristic Evaluation
Authors
김신근한용희문성욱
Keywords
MEMS; CO2 sensor; microbolometer; NDIR
Issue Date
2005-05
Publisher
대한전기학회 논문지 (KIEE International Transactions on Electrophysics and Application)
Citation
VOL 54C, NO 5, 232-237
URI
http://pubs.kist.re.kr/handle/201004/27464
Appears in Collections:
KIST Publication > Article
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