Characteristics of copper films on PET substrate deposited by cyclic operation of RF-magneteron-sputtering coupled with continous operation of ECR-CVD

Title
Characteristics of copper films on PET substrate deposited by cyclic operation of RF-magneteron-sputtering coupled with continous operation of ECR-CVD
Authors
명종윤전법주변동진이중기
Keywords
Cyclic operation; ECR-CVD; RF magnetron; sputter; copper film
Issue Date
2005-07
Publisher
Korean Journal of Materials Research
Citation
VOL 15, NO 7, 465-472
URI
http://pubs.kist.re.kr/handle/201004/27522
Appears in Collections:
KIST Publication > Article
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