Fabrication of a nanosized current-driven spin valve device using proximity correction in electron-beam lithogrpahy

Title
Fabrication of a nanosized current-driven spin valve device using proximity correction in electron-beam lithogrpahy
Authors
이현정뉴엔티호앙옌장준연신경호
Keywords
current-driven; proximity correction; e-beam lithography
Issue Date
2005-03
Publisher
Journal of Vacuum Science & Technology B
Citation
VOL 23, NO 2, 339-343
URI
http://pubs.kist.re.kr/handle/201004/27582
ISSN
1071-1023
Appears in Collections:
KIST Publication > Article
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