Unusual Stress Behavior of W-incorporated Hydrogenated Amorphous Carbon Films

Title
Unusual Stress Behavior of W-incorporated Hydrogenated Amorphous Carbon Films
Authors
왕애영안효신이광렬안재평
Keywords
diamond-like carbon; stress; w incorporation
Issue Date
2005-03
Publisher
Applied physics letters
Citation
VOL 86, NO 11, 111902-1-111902-3
URI
http://pubs.kist.re.kr/handle/201004/27592
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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