Friction Characteristics of Self-assembled Monolayers Coated on Si-wafer by Chemical Vapor Deposition at Nano/Micro-scale

Title
Friction Characteristics of Self-assembled Monolayers Coated on Si-wafer by Chemical Vapor Deposition at Nano/Micro-scale
Authors
아르빈드 싱윤의성한흥구공호성
Keywords
nano; micro; friction; SAM; AFM; CVD
Issue Date
2005-09
Publisher
World Tribology Congress III, Washington D.C., USA
Citation
, 1-2
URI
http://pubs.kist.re.kr/handle/201004/27685
Appears in Collections:
KIST Publication > Conference Paper
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