Optical emission spectroscopy during RF magnetron sputtering of Y2O3, Ba, Cu, and YBa2Cu3O7-x targets under argon and oxygen atmospheres

Title
Optical emission spectroscopy during RF magnetron sputtering of Y2O3, Ba, Cu, and YBa2Cu3O7-x targets under argon and oxygen atmospheres
Authors
김영환조운조
Keywords
High-Tc superconducting film; RF magnetron sputtering; optical emission spectroscopy
Issue Date
2005-04
Publisher
Journal of the Korean Physical Society
Citation
VOL 46, NO 4, 926-930
URI
http://pubs.kist.re.kr/handle/201004/27844
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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