Experimental Study on Wet Thermal and PECVD Oxides for GOI Fabrication

Title
Experimental Study on Wet Thermal and PECVD Oxides for GOI Fabrication
Authors
변영태전영민김선호
Keywords
GaAs-on-insulator (GOI); 열산화막; PECVD 산화막; 열팽창계수
Issue Date
2005-09
Publisher
새물리
Citation
VOL 51, NO 3, 254-259
URI
http://pubs.kist.re.kr/handle/201004/27911
ISSN
0374-4914
Appears in Collections:
KIST Publication > Article
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