Nano-Positioning System Using Linear Ultrasonic Motor with

Title
Nano-Positioning System Using Linear Ultrasonic Motor with
Authors
Sergey Borodin김정도김현재Piotr Vasiljev윤석진
Keywords
nano-positioning; ultrasonic linear motor; shaking beam; resolution
Issue Date
2004-03
Publisher
Journal of electroceramics
Citation
VOL 12, 169-173
URI
http://pubs.kist.re.kr/handle/201004/28179
ISSN
1385-3449
Appears in Collections:
KIST Publication > Article
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