The Structure and Properties of ta-C Film with Dispersion of Incident Beam Energy

Title
The Structure and Properties of ta-C Film with Dispersion of Incident Beam Energy
Authors
이승협김태영이승철정용재브레너이광렬
Keywords
MD; carbon; structure; stress; tetrahedral amorphous carbon; molecular dynamics simulation; Dispersed Incident Energy; compressive residual stress
Issue Date
2005-08
Publisher
Int. Conf. Comp. Nanotechnol.
URI
http://pubs.kist.re.kr/handle/201004/28202
Appears in Collections:
KIST Publication > Conference Paper
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