Stress reduction behavior in metal-incorporated amorphous carbon films

Title
Stress reduction behavior in metal-incorporated amorphous carbon films; first-principle approach

Title
first-principle approach
Authors
최정혜안효신이승철이광렬
Issue Date
2005-09
Publisher
Int. Conf. Asian Consortium for Comp. Mater. Sci.
Citation
VOL 29, 155-158
URI
http://pubs.kist.re.kr/handle/201004/28204
Appears in Collections:
KIST Publication > Conference Paper
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