Crystal growth in the low-temperature deposition of polycrystalline silicon thin film

Title
Crystal growth in the low-temperature deposition of polycrystalline silicon thin film
Authors
신승도김동완김동익김도연
Keywords
EBSD; Rhombic pyramid; Twin; HWCVD; Poly-Si
Issue Date
2005-02
Publisher
Journal of crystal growth
Citation
VOL 274, NO 3-4, 347-354
URI
http://pubs.kist.re.kr/handle/201004/28244
ISSN
0022-0248
Appears in Collections:
KIST Publication > Article
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