Study on direct wafer bonding for GaAs-on-Si wafers using SiO2 Oxide films

Title
Study on direct wafer bonding for GaAs-on-Si wafers using SiO2 Oxide films
Authors
박종국김선호박진우변영태
Keywords
산화막; GaAs-on-Si; 웨이퍼의 직접 접합
Issue Date
2004-11
Publisher
PC04 Photonics Conference 2004
Citation
, FP42
URI
http://pubs.kist.re.kr/handle/201004/28255
Appears in Collections:
KIST Publication > Conference Paper
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