Depending on Polishing Conditions of GaAs/Si3N4/SiO2/Si Wafers to Compare with Bonding Forces

Title
Depending on Polishing Conditions of GaAs/Si3N4/SiO2/Si Wafers to Compare with Bonding Forces
Authors
박종국김선호박진우변영태
Keywords
연마; GaAs/Si3N4/SiO2/Si; 웨이퍼의 접합력
Issue Date
2005-07
Publisher
한국광학회 2005년도 하계학술발표회
Citation
, 46-47
URI
http://pubs.kist.re.kr/handle/201004/28271
Appears in Collections:
KIST Publication > Conference Paper
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