Investigation on Hydrogen Ion Implantation for Fabrication of GaAs-on-insulator (GOI) wafer for Optical Devices

Title
Investigation on Hydrogen Ion Implantation for Fabrication of GaAs-on-insulator (GOI) wafer for Optical Devices
Authors
박종국신상원이종한송종한김선호박진우변영태
Keywords
광소자; GOI 웨이퍼; 수소 이온 주입
Issue Date
2005-11
Publisher
Photonics Conference 2005
Citation
, 187-188
URI
http://pubs.kist.re.kr/handle/201004/28276
Appears in Collections:
KIST Publication > Conference Paper
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