Wafer direct bonding between InP and GGG(Gd3Ga5O12) using O2 plasma

Title
Wafer direct bonding between InP and GGG(Gd3Ga5O12) using O2 plasma
Authors
노종욱양정수옥성해이석우덕하변영태전영민이우영
Keywords
O2 플라즈마; GGG; InP; 웨이퍼 직접 접합
Issue Date
2005-11
Publisher
Photonics Conference 2005
Citation
, 191-192
URI
http://pubs.kist.re.kr/handle/201004/28277
Appears in Collections:
KIST Publication > Conference Paper
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