HRTEM Study on the Atomic Arrangement of the Ge2Sb2Te5 Thin Films Deposited on SiO2/Si Substrates by Sputtering Method

Title
HRTEM Study on the Atomic Arrangement of the Ge2Sb2Te5 Thin Films Deposited on SiO2/Si Substrates by Sputtering Method
Authors
박유진이정용염민수권영석김용태
Issue Date
2005-04
Publisher
Korean Physics Society, The 81st Regular Meeting
Citation
, 264-265
URI
http://pubs.kist.re.kr/handle/201004/28424
Appears in Collections:
KIST Publication > Conference Paper
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