Effect of Hydrogen Addition on Surface Structure and Residual Stress of Hexagonal Boron Nitride Thin Films

Title
Effect of Hydrogen Addition on Surface Structure and Residual Stress of Hexagonal Boron Nitride Thin Films
Authors
이은옥박종극정증현임대순백영준
Keywords
hBN; 수소; Ar 침투량; 잔류응력; 표면구조; Hydrogen; Residual Stress; Surface morphology
Issue Date
2005-10
Publisher
대한금속.재료학회지; J. of Kor. Inst. Met. & Mater. (Journal of the Korean Institute of Metals and Materials)
Citation
VOL 43, NO 10, 667-671
URI
http://pubs.kist.re.kr/handle/201004/28518
ISSN
0253-3847
Appears in Collections:
KIST Publication > Article
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