Effect of Hydrogen Addition on Surface Structure and Residual Stress of Hexagonal Boron Nitride Thin Films
- Effect of Hydrogen Addition on Surface Structure and Residual Stress of Hexagonal Boron Nitride Thin Films
- 이은옥; 박종극; 정증현; 임대순; 백영준
- hBN; 수소; Ar 침투량; 잔류응력; 표면구조; Hydrogen; Residual Stress; Surface morphology
- Issue Date
- 대한금속.재료학회지; J. of Kor. Inst. Met. & Mater. (Journal of the Korean Institute of Metals and Materials)
- VOL 43, NO 10, 667-671
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- KIST Publication > Article
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