CVD법에 의한 SiCN 나노와이어의 성장

Title
CVD법에 의한 SiCN 나노와이어의 성장
Authors
안명원양재웅김재수이재훈노대호김나리
Keywords
CVD; SiCN; nanowire
Issue Date
2005-10
Publisher
2005년 대한금속재료학회 추계학술대회
Citation
, 127-127
URI
http://pubs.kist.re.kr/handle/201004/28535
Appears in Collections:
KIST Publication > Conference Paper
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