Characteristics of SiC film using Tetramethylsilane

Title
Characteristics of SiC film using Tetramethylsilane
Authors
김나리김재수노대호이재훈안명원변동진
Keywords
Tetramethylsilane; SiC film
Issue Date
2005-11
Publisher
2005년도 한국재료학회 추계학술대회
Citation
, 275-275
URI
http://pubs.kist.re.kr/handle/201004/28540
Appears in Collections:
KIST Publication > Conference Paper
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