Direct growth of SiC nanorods on Si using APCVD and single precursors

Title
Direct growth of SiC nanorods on Si using APCVD and single precursors
Authors
노대호김재수변동진양재웅진정근김나리
Keywords
SiC nanorod; SiC; nanorod; tetramethylsilane; APCVD
Issue Date
2004-11
Publisher
Materials science forum
Citation
VOL 449-452, 701-704
URI
http://pubs.kist.re.kr/handle/201004/28558
ISSN
0255-5476
Appears in Collections:
KIST Publication > Article
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